Lyncee Tec DHM R-series

Description

The DHM® – R series is a reflection configured Digital Holographic Microscope (DHM®), providing a non-scanning and non-contact method for static and dynamic 3D topography as well as vibration characterization. It measures the 3D topography map of a surface with a single acquisition, without any scanning mechanism required. It provides unbeatably fast acquisition, at camera rates of up to 100,000 fps, enabling routine inspections with high productivity and the capture of 3D topographies on the production line without stopping the sample.

The vertical calibration of DHM is intrinsically defined by the laser wavelength, providing high accuracy, reproducible data, and a subnanometric vertical resolution. Thanks to advanced numerical processing of the recorded hologram, sharp focus can be performed simultaneously or after measurement as post-processing, without manually adjusting the height of the sample.

DHM-R measuring through a glass window

Three configurations are available based on the number of wavelengths:

R1000 models: Configured with a single wavelength; the ideal tool for measuring smooth surfaces and vibrations.
R2100 models: Configured for measuring simultaneously at two wavelengths for achieving measurement of complex or discontinuous structures.
R2200 models: R2100 with a third source to extend measurement capability, in particular for measuring transparent patterns.

Single wavelength configuration

Dual wavelengths configuration

3 wavelengths configuration

Applications

MEMS Analysis up to 25 MHz: Out-of-plane vibration amplitude resolution of 5pm and in-plane displacement resolution of 1nm using an optional stroboscopic unit. It provides a time-sequence of 3D topographies, frequency resonances, and responses.
Deformable & Soft Samples: Study of the 3D dynamic behavior of deformable samples and topography of soft materials and liquids.
Large Surface Screening: Fast screen and analysis of large surfaces.
Controlled Environmental Measurements: Measurements through glass and immersion liquids, or inside environmental and vacuum chambers under controlled temperature, humidity, pressure, or gas composition.
Transparent Patterns & Multi-layers: Measurement of the topography of transparent structures, thicknesses, and refractive index values of structured multi-layers ranging from 10 nanometers to tens of microns.

Time sequence of 3D topographies, limited by camera rate : evaporation of a liquid drop

Specifications

System
DHM models	R1000	R2100	R2200
Number of laser sources	1	2	3
Operating wavelength (± 1.0 nm)	675 nm	675 nm, 794 nm	666 nm, 794 nm, 675 nm
Laser wavelength stability	0.01 nm/°C at 675 nm
Sample stage	Manual or motorized XYZ stages up to 300 mm x 300 mm x 38 mm travel range
Objectives	Magnification 1.25x to 100x, standard, high NA, long working distance, water/oil immersion
Objective turret	6 positions
Computer	Workstation with latest multicore Intel® processor, high performance graphic card optimized and configured for DHM with screen min 21inch and mouse
Software	Proprietary Koala software based on C++ and .NET Additional optional software modules available for advanced analysis
Data compatibility	Measurement data recorded in bin format, exportable in .txt format, recorded and reconstructed images exportable in .tif format or .txt array
Performance
Measurement mode	Single wavelength at 675 nm	Short synthetic wavelength at 4.4 μm	Long synthetic wavelength at 50 μm
DHM models	R1000, R2100, R2200	R2100, R2200	R2200
Accuracy 1[nm]	0.15	0.15 / 3.0 *	20
Vertical resolution 2[nm]	0.3	0.30 / 6.0 *	40
Repeatability 3[nm]	0.01	0.01 / 0.1 *	0.5
Vertical measuring range	up to 200 μm	up to 200 μm	up to 200 μm
Max. height of steps with sharp edges	up to 333 nm4	up to 2.1 μm4	up to 24 μm4
Surface type	Smooth surfaces	Complex or discontinuous structures	Complex or discontinuous structures
Vertical calibration	Determined by interferometric optical filter, ±0.1 nm
Acquisition time	Standard: 500 μs (optional 10 μs)
Acquisition rate	Standard: 190 fps (1024 x 1024 pixels). (optional up to 100'000 fps).
Reconstruction rate	Up to 25 fps 1024 x 1024 pixels hologram (data analysis dependent ). (optional up to 60 fps )
Lateral resolution	Objective dependent, down to 300 nm **
Field of view	Objective dependent, from 66 μm x 66 μm up to 5 mm x 5 mm **
Working distance	Objective dependent, from 0.3 to 18 mm **
Digital focusing range	Up to 50x depth of field (objective dependent)
Min. sample reflectivity	Less than 1%
Sample illumination	Down to 1 μW/cm2
Stroboscopic unit	Compatibility with single and short synthetic wavelength

Power requirements
Input voltage	85-260 VAC – 50/60 Hz
Power requirements	max. 250 W

Dimensions & weight
Dimensions (L x W x H)	600 x 600 x 800 mm
Weight	48kg

1 As demonstrated by taking the temporal standard deviation on 1 pixel over 30 measurements
2 Defined as twice the accuracy
3 As demonstrated by taking the one sigma Rq value of 30 repeatability measurements without sample
4 Depends on the laser source(s) and operating wavelength(s)
* With / Without single wavelength mapping
** Objectives specifications on www.lynceetec.com/microscope-objectives

Options

Objectives with extra-LWD, cover-glass correction, for immersion, etc.
Motorized stage for automation and stitching
Remote TCP/IP module for automation and remote control of DHM
Stroboscopic unit for MEMS analysis
Environmental chamber for measuring under controlled conditions