Zolix Carrier.S100-OB.Z 대물렌즈 오토포커스 스캐닝 테이블

Zolix Carrier.S100-OB.Z 대물렌즈 오토포커스 스캐닝 테이블

Carrier.S100-OB.Z objective autofocus piezoelectric scanning table
대물렌즈 오토포커스 압전 스캐닝 테이블

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Description

Piezoelectric Large-range piezoelectric scanning Carrier.S100-OB.Z Piezoelectric motion@RT solutions .Carrier Series Large Travel Scanning – Precision Optics, Semiconductor Characterization Piezo-Linear Stage with compact shape and no compromise on power performance; while guaranteeing a premium price space.

대범위 압전 스캔 Carrier.S100-OB.Z. 압전 모션 솔루션 .Carrier 시리즈. 대행정 스캔 캐리어.

Specifications

Product Features
• Z-directional motion range of 200 um
• Fastest stabilization time (90% position stabilization) within 20ms
• Closed-loop positioning accuracy better than 1 nm
• Maximum load 500 g
• Controller compatible with MultiFieldsⓇ Motion Controller – Archimedes Series
• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades

Optional Versions ⇨

Default

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

1           Orientation of movement

Z axis

2           Travel range

100 um

3           Linearity

0.02%

4           Pitch / Yaw

30 urad

5           Position encoder

Resistive Sensor

6           Sensor noise

0.3 nm

7           Z axis resolution, open-loop

0.1 nm

8           Stabilize time (90% Position)

15 ms

9           Rigidity

0.4 N/um

10          Resonant frequency (no load)

650 Hz

11          Resonant frequency (150g load)

275 Hz

12          Weight

270 g

13          Mainbody

Stainless steel 304，Aluminum alloy