Zolix Carrier.S200.XY 대범위 압전 스캐닝 테이블 Large-Range Piezo XY

Zolix Carrier.S200.XY 대범위 압전 스캐닝 테이블 Large-Range Piezo XY

Carrier.S200.XY large-range piezoelectric XY scanning table
대범위 XY 압전 스캐닝 테이블

Categories: , Tags: , , , , , Brand:

Description

Piezoelectric Large scale scanning motion Carrier.S200.XY Piezoelectric motion@RT solutions .Carrier Series Large scale scanning carrier – Precision Optics, Semiconductor Characterization Piezo-Linear Stage with compact shape and no compromise on power performance; while guaranteeing a premium price space.

대규모 스캔 압전 모션 Carrier.S200.XY. 압전 모션 솔루션 .Carrier 시리즈. 정밀 광학·반도체 특성화를 위한 대규모 스캔 캐리어.

Specifications

• Two-dimensional XY scanning motion 200 um × 200 um
• Closed-loop positioning accuracy better than 1 nm
• Maximum load 500 g
• Customized solutions for optical microscopy-super-resolution
• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades
 

Optional Versions ⇨

Default

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

1            Bottom size * height

180 mm × 150 mm × 20 mm

2            Main Material

Aluminum alloy

3            Hollow perforation

80 mm × 60 mm

4            Travel

200 um × 200 um

5            Closed-loop resolution

< 1nm

6            Maximum load

500 g

7            Closed-loop sensors

Capacitive

8            Capacitance accuracy

0.3 nm

9            Piezoelectric capacitance (X, Y)

6.5 uF

10           Operating temperature

15 – 40 °C

11           Quality

1 kg

12           Installation

Automatic compatibility of threaded holes

Carrier.L7550.XY