Zolix Carrier.L7550.XY 초대범위 압전 스캐닝 테이블 Ultra Large-Range

Zolix Carrier.L7550.XY 초대범위 압전 스캐닝 테이블 Ultra Large-Range

Carrier.L7550.XY ultra large-range piezoelectric XY scanning table
초대범위 압전 XY 스캐닝 테이블

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Description

Piezoelectric Large Travel Linear Motion Carrier.L7550.XY Piezoelectric motion@RT solutions .Carrier Series Large Travel Carrier – Precision Optics, Semiconductor Characterization

대행정 압전 선형 모션 캐리어 Carrier.L7550.XY. 압전 모션 솔루션 .Carrier 시리즈. 정밀 광학·반도체 특성화를 위한 대행정 캐리어.

Specifications

Piezo-Linear Stage with compact shape and no compromise on power

performance; while guaranteeing a premium price space.
 

• XY-directional range 75 mm × 50 mm

• Smallest size of about 20 nm
• Maximum velocity 20 mm/s
• Closed-loop sensing with 100 nm / 10 nm spatial resolution
• Guaranteed through-hole of 85 mm × 65 mm for full range of motion
• Supports no magnetism (.NM) & ultra-high vacuum (.UHV)
• Main body aluminum alloy (hard oxide blackened)
 

Optional Versions ⇨

Default

.NM

.HV

.UHV

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

Orientation of

1         movement

X，Y

2         Bottom size * height

250 mm × 200 mm ×  30 mm

Required installation

3         space

325 mm × 250 mm

4         Effective perforation

85 mm × 65 mm

5         Main Material

Aluminum alloy

6         Cables & Connectors

Standard shielded cable

D-Sub 9 Connector

Kapton enameled Wire，

PEEK-2mm Pin

7         Operating temperature

10 – 40 °C

Motion parameters – space recommended mounting form I. (The following properties are measured in the recommended installation form)

8         Travel

75 mm × 50 mm

9         MAX. Velocity

~ 20 mm/s

10        Min. Step

～ 30 nm

11        Drive Frequency

Max. 20 kHz （Super quiet movement）

12        Maximum load

2 kg

13        Full-travel pitch/yaw

0.8 mrad

传感精度

14        Position Sensing Type

– Resistance type sensing ( .R )

– Optical scale sensing ( .O )

15        Position sensing range

75 mm × 50 mm

16       Position sensing resolution

– Resistance type sensing ( .R ), 100-200 nm

– Optical scale sensing ( .O ), 10 nm ( default )，1nm ( option )