Description

Piezo 6D Positioning System HP120.Lab.O / .R (Colse-loop) Piezoelectric motion@RT solutions .Lab Series Well packaged piezoelectric motion unit 6 degrees; Parallel design; More stable. Features: Super silent，20 kHz drive frequency Size: Ø126 74 mm Close loop Resistive encoder (.R) Optical encoder (.O) optional High precision Resolution (.O) 1 nm、10 nm Optional Economical Resolution(.R) 100-200nm Minimum step size 10 nm 20 mm (XY); 10 mm (Z); 20 (ΘxΘy); 30 (Θz) Maximum vertical load: 500 g Non magnet（.NM）、High Vacuum（.HV） Ultra-high Vacuum（.UHV）optional HP120.Lab.O / .R Piezo 6D Positioning System Technical Parameters

압전 6D 포지셔닝 시스템 HP120.Lab.O/.R(폐루프). 압전 모션 솔루션 .Lab 시리즈. 6축 병렬 설계로 높은 안정성을 제공합니다. 주요 특징: 20kHz 구동 주파수(초저소음), 크기 Φ126×74mm, 저항형(.R) 및 광학형(.O) 엔코더 선택, 광학형 엔코더 분해능 1nm·10nm 옵션, 저항형 분해능 100~200nm, 최소 스텝 크기 10nm.

Specifications

Optional Versions
Version Code	Default / .NM (Non-magnet) / .HV (High vacuum) / .UHV (Ultra-high vacuum)
General Specifications
Size	Ø126 × 74 mm
Material	Stainless Steel (Default) / Pure Titanium (.NM) / Stainless Steel (.HV, .UHV)
Cable & Connector (6x)	Shielded cable & DSub9 (.Default) / Kapton coated wire, PEEK-2mm pins (.HV/.UHV)
Travel range XYZ	20 × 20 × 10 mm
Travel range ΘxΘyΘz	20 × 20 × 30°
Minimum step size	~ 10 nm
Drive frequency	Max. 20 kHz (super silent)
Maximum vertical load	5 N
Maximum vertical holding force	10 N
Encoder
Encoder type	Resistive encoder (.R) / Optical encoder (.O)
Encoder range	30 mm
Resolution (Resistive)	100–200 nm
Resolution (Optical)	10 nm; 1 nm optional