Zolix 3D 압전 스캐닝 테이블 3-D Piezoelectric Scanning Table

Name: Zolix 3D 압전 스캐닝 테이블 | Piezoelectric Scanning Table
Brand: 09. Optics & Fibers

3-D piezoelectric scanning table for nanometer-precision XYZ positioning
나노미터 정밀도 XYZ 3D 압전 스캐닝 테이블

Description

Piezoelectric motion@RT solutions .Lab Series 3 degrees of freedom scanning motion – precision optics, semiconductor characterization

압전 모션 솔루션 .Lab 시리즈. 정밀 광학·반도체 특성화를 위한 3자유도 스캔 모션.

• Three-dimensional XY scanning motion 150 um × 150 um × 150 um

• External dimensions, 55 mm × 55 mm × 42 mm

• Closed-loop positioning accuracy better than 1 nm

• Maximum load 500 g

• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades

	.NM version, non-magnetic; .UHV version, compatible with 2E-11 mbar
General Information
1 Orientation of movement	X，Y，Z
2 Bottom size * height	55 mm × 55 mm × 55 mm
3 Main Material	Aluminum alloy / Stainless steel
4 Travel	150 um × 150 um × 150 um
Movement & Positioning
5 Motion Resolution	0.2 nm
6 Repeatable accuracy of motion	15 nm
7 Linearity error	< 0.1%
8 Resonance frequency – 50g load	220 Hz
9 Rigid	0.5 N/um
10 Maximum load	500 g
11 Closed-loop sensors	Capacitive
12 Capacitance accuracy	0.3 nm
13 Piezoelectric capacitance (X,Y)	Max. 120 V
Other
14 Operating temperature	-20 ~ 80 °C
15 Quality	200 g
16 Cable length	1.5 m / micro-Sub connector