Name: Zolix XYR 전동 3축 스테이지 | Motorized Three-Axis Stage
Brand: 09. Optics & Fibers

Description

XYR series motorized all-in-one three-axis stages are parallel-type alignment systems for the workpieces which are needed to be scanned or aligned in production lines to meet requirements of high precision and high operation repetition rate. Each XYR all-in-one stage system includes upper-table, baseplate and four units of motion modular between them. Every module is guided by cross-roller guides and bearings. Three of them can be driven by short-lead ball screws, with standard stepping motors. Five-phase stepping motors and servo motors are optional. Central position of stages is used for keeping a light-through hole for transmission-type applications, or, keep a standard table without hole to meet the requirements of reflection-type operations. Main characteristics: Using ball screws to meet the requirement of high precise and high repetition operations Better motion accuracy is guaranteed by employing crossroller guides and bearings Standard modular-design principles present better uniformity of parts and shorter delivery time of products Rectangular light-through hole is provided to make stages be suitable for transmission-type applications Two-phase stepping motors are standard. Five-phase stepping or servo motors are optional Naming rules:

XYR 시리즈 전동 일체형 3축 스테이지는 생산 라인에서 고정밀·고반복 스캔 또는 정렬이 필요한 공작물을 위한 병렬 정렬 시스템입니다.

Naming Rules

XYR	All-in-one XY three-axis stage (X, Y linear + θz rotation)
Baseplate dimension	210: 210×210 mm / 230: 230×230 mm / 400: 400×400 mm
Table dimension	150: 150×150 mm / 200: 200×200 mm / 300: 300×300 mm
S	Stainless steel main body (default: black anodic-oxidation aluminum-alloy)
-CH	With central light-through hole
Motor	None: two-phase stepping / ST5xx: five-phase stepping / ASPx: Panasonic servo

Specifications

Parameter	XYR150210	XYR200230	XYR300400-CH
Mechanical Specifications
Travel X/Y (mm)	±4.5	±10	±15
Rotation θz range (°)	±5
Table dimensions (mm)	150×150	200×200	300×300
Baseplate dimension (mm)	210×210	230×230	400×400
Overall height (mm)	62.5	76	98
Transmission	Precise ball screws Φ8×2
Guides	Cross-roller guides
Materials	Black anodic-oxidation aluminum-alloy
Weight (kg)	6	8	15
Accuracy Specifications
X/Y resolution step/half (μm)	10 / 5
20-subdivision resolution (μm)	0.5
Repositioning accuracy (μm)	≤±3
Static parallelism (mm)	≤0.03	≤0.04	≤0.05
Motion parallelism (μm)	≤20		≤30
Highest speed (mm/s)	20
Electrical Specifications
Motor type	Two-phase 28 stepping, 1.8°	Two-phase 42 stepping, 1.8°
Motor model	Shinano, STP-28D1003-08	Shinano, SST43D2126-10
Working current (A)	1.3	1.7
Holding torque (N·m)	0.0785	0.456
Stepping driver (optional)	Moons, SR2
Plugs	1×DB9 (pin)
Position-limit sensors (each axis)	2×GP1S09xHCPI (Sharp)		2×PM-L25 (SUNX)
Origin-point sensors (each axis)	1×GP1S09xHCPI (Sharp)		1×PM-L25 (SUNX)
Sensor voltage (V)	DC 5~24V ±10%
Software	Stage control and alignment software available (extra charge)
Operating Load
Horizontal (kg)	20	30	50